3.21.1 Thermal Resistance and Capacitance Calculations

The thermal resistance ($R_{th}$) and capacitance ($C_{th}$) are modified from BSIM-SOI to capture the fin pitch ($FPITCH$) dependence.

$NFIN_{total} = NF \cdot NFIN \qquad (3.618)$

$\dfrac{1}{R_{th}} = G_{th} = \dfrac{WTH0 \cdot {NF}^{BSHEXP} + FPITCH \cdot {NFIN_{total}}^{ASHEXP} }{RTH0} \qquad (3.619)$

$C_{th} = CTH0 \cdot (WTH0 \cdot {NF}^{BSHEXP} + FPITCH \cdot {NFIN_{total}}^{ASHEXP}) \qquad (3.620)$

When $ASHEXP = 1$, $BSHEXP = 1$, the expressions for $R_{th}$ and $C_{th}$ are backward compatible with BSIM-CMG 108.0.

Figure 11: RC network for self-heating calculation [13]

References

[13] BSIM-SOI model. Department of Electrical Engineering and Computer Science, UC Berkeley.