5.1.1 Basic Device Parameter List

The objective of this procedure is to find one global set of parameters for BSIM-CMG to fit experimental data for devices with channel length ranging from short to long dimensions.

Some parameters are measured or specified by user, and need not be extracted, such as those given in Table 3.

Table 3: Examples of parameters that are measured or specified by the user.

Parameter Description
EOT EOT Gate oxide thickness
HFIN HFIN Fin height
TFIN TFIN Fin thickness
L L Fin length drawn
NFIN NFIN Number of fins
NF NF Number of fingers in parallel
NBODY NBODY Channel doping concentration
BULKMOD BULKMOD 0: SOI; 1: bulk
GIDLMOD GIDLMOD 0: off; 1: on
GEOMOD GEOMOD 0: double gate; 1: triple gate; 2: quadruple gate
RDSMOD RDSMOD 0: internal bias-dependent, external bias-independent; 1: external; 2: internal
TYPE TYPE 0: PMOS; 1: NMOS
NGATE NGATE 0: metal gate; >0: poly gate doping

Parameters that are going to be extracted are divided into two categories. Category one parameters are presented as the coefficients in a set of length dependent intermediate quantities. These intermediate quantities are introduced to facilitate the extraction procedure. To keep the procedure simple, these quantities are not visible to the end user. Category two parameters don’t appear in these intermediate quantities.

The length dependent intermediate quantities, 9 in total, are summarized in Table 4.

Table 4: Classification of length dependent parameters

Group Parameters
Group 1 U0[L],ΔL[L],UA[L],UD[L],RDSW[L] U0[L], \Delta L[L], UA[L], UD[L], RDSW[L] (relates to mobility and Rseries R_{series} )
Group 2 VSAT[L],VSAT1[L],PTWG[L] VSAT[L], VSAT1[L], PTWG[L] (relates to velocity saturation)
Group 3 MEXP[L] MEXP[L] (relates to smoothing functions)

Category Two parameters which don't appear in the length dependent functions are: PHIG PHIG , CIT CIT , EU EU , ETAMOB ETAMOB , DVT0 DVT0 , DVT1 DVT1 , CDSC CDSC , DVT2 DVT2 , ETA0 ETA0 , DSUB DSUB , CDSCD CDSCD , AGIDL AGIDL , BGIDL BGIDL , EGIDL EGIDL , PCLM PCLM , PDIBL1 PDIBL1 , PDIBL2 PDIBL2 , DROUT DROUT , PVAG PVAG , etc.

Since Category One parameters can only manifest themselves by first yielding the 9 length dependent intermediate quantities, determining the value of these intermediate quantities is inevitable if we want to extract them. Category Two parameters, however, can be extracted from experimental data directly.

Now we start extracting all the global parameters in both categories. The extraction procedure can be divided into 8 stages:

  • Step 0: Parameter initialization
  • Step 1-6: Linear region
  • Step 7-11: Saturation region
  • Step 12-13: GIDL and output conductance
  • Step 14: Smoothing between linear and saturation regions
  • Step 15: Parameters for temperature effect and self-heating effect
  • Step 16: Gate/junction leakage current
  • Step 17: Other important physical effects

See the extraction overview flow chart for details.

Figure 13

Figure 13: Extraction flow chart

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